EUV light source
LPP-EUV light source that achieves high brightness and low debris.
ISTEQ's TEUS series is an EUV light source that utilizes laser-produced plasma, achieving high brightness and low debris. Unlike conventional droplet targets, it prevents the adhesion of debris generated during plasma formation to the optical system.
- 企業：ケイエルブイ
- 価格：Other
